Basic Info.
Product Description
1700 degree Chemical vapor deposition 3 zone high temperature tube furnace
Application of high temperature tube furnace
1.Material preparation
2.precious metals preparation
3.membrane and coating
4. Semiconductor and small metal annealing
5.Chemical vapor deposition method for thin film coating.
Featrues of high temperature tube furnace
1.Upper and lower sub-structure, easy to pick and place tubes
2.High purity quartz tube, can bear max. temperature 1150C
3.Programmable and PID automatic control
4.Imported energy saving chamber material
5.Double layer structure, can prevent user from burn
6.Double cooling fan
Specifications:
| Model | CY-T1700-80IC-3ZV10 |
| Limiting temperature | 1700ºC |
| Working temperature | ≤1650ºC |
| Heating rate | Suggestion 0~20ºC/min |
| Temperature zone | Single |
| Temperature accuracy | ±1ºC |
| Chamber size | Φ80×1300(mm) |
| Heating element | Imported alloy heating wire |
| Thermal couple | B Type |
| Temperature control | PID automatic control via SCR power control |
| Heating curves | 30 steps programmable |
| Chamber material | Imported fiber |
| Heating zone | 190+250+190mm |
| Working temperature | 1300°c, 1600°c, 1300°c |
| Tube material | alundum tube |
| Tube length | 1300mm |
| Sealing type | stainless steel vacuum flange |
| Tightness | 4.03*10-3Pa |
| Current and voltage Monitoring | Analog galvanometer |
| Main power | 2.5kw |
| gas way | 3 gas can be connected |
| A way range | 100SCCM |
| B way range | 300SCCM |
| C way range | 500SCCM |
| Gas line pressure | 0.1-0.15Mpa |
| System vacuum | 5-10Pa |
| Pump connection | KF16 stainless steel Bellows, KF16 clamps, KF16 flapper valve |
| Vacuum meter | INFCON |
| Working voltage | 220V 50-60Hz |
Pictures of Furnace:
Company Information:
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design,
manufacturing and sales of equipment used in scientific researches.
Independence and innovation is the company's tenet.Our main products include:
tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system
and customized lab equipment.Welcome you come to visit us.
Exhibition
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